UTA versus line emission for EUVL : studies on xenon emission at the NIST EBIT

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dc.contributor.author Fahy, Kenneth
dc.contributor.author Dunne, Padraig
dc.contributor.author McKinney, Luke
dc.contributor.author O'Sullivan, Gerry
dc.contributor.author Sokell, Emma
dc.contributor.author White, John K.
dc.contributor.author Aguilar, A.
dc.contributor.author Pomeroy, J.M.
dc.contributor.author Tan, J.N.
dc.contributor.author Blagojevi, B.
dc.contributor.author LeBigot, E.-O.
dc.contributor.author Gillaspy, J.D.
dc.date.accessioned 2012-07-26T15:46:22Z
dc.date.available 2012-07-26T15:46:22Z
dc.date.copyright 2004 IOP Publishing en
dc.date.issued 2004-12
dc.identifier.citation Journal of Physics D: Applied Physics en
dc.identifier.uri http://hdl.handle.net/10197/3728
dc.description.abstract Spectra from xenon ions have been recorded at the NIST EBIT and the emission into a 2% bandwidth at 13.5 nm arising from 4d_5p transitions compared with that from 4d_4f and 4p_4d transitions in Xe XI and also with that obtained from the unresolved transition array (UTA) observed to peak just below 11 nm. It was found that an improvement of a factor of five could be gained in photon yield using the UTA rather than the 4d_5p emission. The results are compared with atomic structure calculations and imply that a significant gain in efficiency should be obtained using tin, in which the emission at 13.5 nm comes from a similar UTA, rather than xenon as an EUVL source material. en
dc.description.sponsorship Science Foundation Ireland en
dc.format.extent 430083 bytes
dc.format.mimetype application/pdf
dc.language.iso en en
dc.publisher IOP Publishing en
dc.subject EUV en
dc.subject.lcsh Ultraviolet radiation en
dc.subject.lcsh Extreme ultraviolet lithography en
dc.title UTA versus line emission for EUVL : studies on xenon emission at the NIST EBIT en
dc.type Journal Article en
dc.internal.availability Full text available en
dc.status Peer reviewed en
dc.identifier.volume 37 en
dc.identifier.issue 23 en
dc.identifier.startpage 3225 en
dc.identifier.endpage 3232 en
dc.identifier.doi 10.1088/0022-3727/37/23/003
dc.neeo.contributor Fahy|Kenneth|aut| en
dc.neeo.contributor Dunne|Padraig|aut| en
dc.neeo.contributor McKinney|Luke|aut| en
dc.neeo.contributor O'Sullivan|Gerry|aut| en
dc.neeo.contributor Sokell|Emma|aut| en
dc.neeo.contributor White|John K.|aut| en
dc.neeo.contributor Aguilar|A.|aut| en
dc.neeo.contributor Pomeroy|J.M.|aut| en
dc.neeo.contributor Tan|J.N.|aut| en
dc.neeo.contributor Blagojevi|B.|aut| en
dc.neeo.contributor LeBigot|E.-O.|aut| en
dc.neeo.contributor Gillaspy|J.D.|aut| en

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