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| dc.contributor.author | Fahy, Kenneth | |
| dc.contributor.author | Dunne, Padraig | |
| dc.contributor.author | McKinney, Luke | |
| dc.contributor.author | O'Sullivan, Gerry | |
| dc.contributor.author | Sokell, Emma | |
| dc.contributor.author | White, John K. | |
| dc.contributor.author | Aguilar, A. | |
| dc.contributor.author | Pomeroy, J.M. | |
| dc.contributor.author | Tan, J.N. | |
| dc.contributor.author | Blagojevi, B. | |
| dc.contributor.author | LeBigot, E.-O. | |
| dc.contributor.author | Gillaspy, J.D. | |
| dc.date.accessioned | 2012-07-26T15:46:22Z | |
| dc.date.available | 2012-07-26T15:46:22Z | |
| dc.date.copyright | 2004 IOP Publishing | en |
| dc.date.issued | 2004-12 | |
| dc.identifier.citation | Journal of Physics D: Applied Physics | en |
| dc.identifier.uri | http://hdl.handle.net/10197/3728 | |
| dc.description.abstract | Spectra from xenon ions have been recorded at the NIST EBIT and the emission into a 2% bandwidth at 13.5 nm arising from 4d_5p transitions compared with that from 4d_4f and 4p_4d transitions in Xe XI and also with that obtained from the unresolved transition array (UTA) observed to peak just below 11 nm. It was found that an improvement of a factor of five could be gained in photon yield using the UTA rather than the 4d_5p emission. The results are compared with atomic structure calculations and imply that a significant gain in efficiency should be obtained using tin, in which the emission at 13.5 nm comes from a similar UTA, rather than xenon as an EUVL source material. | en |
| dc.description.sponsorship | Science Foundation Ireland | en |
| dc.format.extent | 430083 bytes | |
| dc.format.mimetype | application/pdf | |
| dc.language.iso | en | en |
| dc.publisher | IOP Publishing | en |
| dc.subject | EUV | en |
| dc.subject.lcsh | Ultraviolet radiation | en |
| dc.subject.lcsh | Extreme ultraviolet lithography | en |
| dc.title | UTA versus line emission for EUVL : studies on xenon emission at the NIST EBIT | en |
| dc.type | Journal Article | en |
| dc.internal.availability | Full text available | en |
| dc.status | Peer reviewed | en |
| dc.identifier.volume | 37 | en |
| dc.identifier.issue | 23 | en |
| dc.identifier.startpage | 3225 | en |
| dc.identifier.endpage | 3232 | en |
| dc.identifier.doi | 10.1088/0022-3727/37/23/003 | |
| dc.neeo.contributor | Fahy|Kenneth|aut| | en |
| dc.neeo.contributor | Dunne|Padraig|aut| | en |
| dc.neeo.contributor | McKinney|Luke|aut| | en |
| dc.neeo.contributor | O'Sullivan|Gerry|aut| | en |
| dc.neeo.contributor | Sokell|Emma|aut| | en |
| dc.neeo.contributor | White|John K.|aut| | en |
| dc.neeo.contributor | Aguilar|A.|aut| | en |
| dc.neeo.contributor | Pomeroy|J.M.|aut| | en |
| dc.neeo.contributor | Tan|J.N.|aut| | en |
| dc.neeo.contributor | Blagojevi|B.|aut| | en |
| dc.neeo.contributor | LeBigot|E.-O.|aut| | en |
| dc.neeo.contributor | Gillaspy|J.D.|aut| | en |
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