Control of MEMS vibration modes with Pulsed Digital Oscillators : Part I — theory

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Show simple item record Blokhina, Elena Pons Nin, Joan Ricart, Jordi Feely, Orla Dominguez, Manuel 2012-01-20T16:44:05Z 2012-01-20T16:44:05Z 2010 IEEE en 2010-08
dc.identifier.citation IEEE Transactions on Circuits and Systems I en
dc.identifier.issn 1549-8328
dc.description.abstract The aim of this paper is to show that it is possible to excite selectively different mechanical resonant modes of a MEMS structure using Pulsed Digital Oscillators (PDOs). This can be done by simply changing the working parameters of the oscillator, namely its sampling frequency or its feedback filter. A set of iterative maps is formulated to describe the evolution of the spatial modes between two sampling events in PDOs. With this lumped model, it is established that under some circumstances PDO bitstreams related to only one of the resonances can be obtained, and that in the antioscillation regions of the PDO the mechanical energy is absorbed into the electrical domain on average. The possibility of selecting for a given resonant frequency the oscillation and antioscillation behaviour allows one to obtain oscillations at any given resonant mode of the MEMS structure. en
dc.description.sponsorship Science Foundation Ireland en
dc.format.extent 1218971 bytes
dc.format.mimetype application/pdf
dc.language.iso en en
dc.publisher IEEE en
dc.rights Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting/republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works. en
dc.subject Microelectromechanical systems en
dc.subject Oscillators en
dc.subject Microresonators en
dc.subject Sigma-delta modulation en
dc.subject Multimode control en
dc.subject Energy efficiency en
dc.subject.lcsh Microelectromechanical systems en
dc.subject.lcsh Microresonators (Optoelectronics) en
dc.subject.lcsh Oscillators, Electric en
dc.subject.lcsh Modulation (Electronics) en
dc.title Control of MEMS vibration modes with Pulsed Digital Oscillators : Part I — theory en
dc.type Journal Article en
dc.internal.availability Full text available en
dc.internal.webversions en
dc.status Peer reviewed en
dc.identifier.volume 57 en
dc.identifier.issue 8 en
dc.identifier.startpage 1865 en
dc.identifier.endpage 1878 en
dc.identifier.doi 10.1109/TCSI.2009.2038541
dc.neeo.contributor Blokhina|Elena|aut| en
dc.neeo.contributor Pons Nin|Joan|aut| en
dc.neeo.contributor Ricart|Jordi|aut| en
dc.neeo.contributor Feely|Orla|aut| en
dc.neeo.contributor Dominguez|Manuel|aut| en
dc.description.admin ke - kpw12/12/11 en

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