Coherent imaging of periodic thick fine isolated structures

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dc.contributor.author Sheridan, John T.
dc.contributor.author Sheppard, Colin
dc.date.accessioned 2011-11-03T15:21:05Z
dc.date.available 2011-11-03T15:21:05Z
dc.date.copyright 1993 Optical Society of America en
dc.date.issued 1993-04-01
dc.identifier.citation Journal of the Optical Society of America A en
dc.identifier.issn 1084-7529 (print)
dc.identifier.issn 1520-8532 (online)
dc.identifier.uri http://hdl.handle.net/10197/3288
dc.description.abstract The diffraction orders and coherent bright and dark field images produced by isolated steps and grooves (notches and trenches) are examined. The isolated structures are approximated by means of a grating with a large period that contains small, widely separated, lamellar structures. The rigorous modal method for TE polarized incident light is used for the numerical calculations. Structures in two types of dielectric material, refractive index n = 1.5 and n = 4.0, are discussed. The images are examined for variations with several parameters, including width and thickness of the structure and focus position. Several approximate methods for calculating these images, based on first-order approximations, are suggested. en
dc.description.sponsorship Other funder en
dc.format.extent 1766016 bytes
dc.format.extent 1072 bytes
dc.format.mimetype application/pdf
dc.format.mimetype text/plain
dc.language.iso en en
dc.publisher Optical Society of America en
dc.rights This paper was published in Journal of the Optical Society of America A and is made available as an electronic reprint with the permission of OSA. The paper can be found at the following URL on the OSA website: http://www.opticsinfobase.org/abstract.cfm?URI=josaa-10-4-614. Systematic or multiple reproduction or distribution to multiple locations via electronic or other means is prohibited and is subject to penalties under law. en
dc.subject.lcsh Dielectrics en
dc.subject.lcsh Diffraction en
dc.subject.lcsh Microscopy en
dc.title Coherent imaging of periodic thick fine isolated structures en
dc.type Journal Article en
dc.internal.availability Full text available en
dc.internal.webversions Publisher's version en
dc.internal.webversions http://dx.doi.org/10.1364/JOSAA.10.000614 en
dc.status Not peer reviewed en
dc.identifier.volume 10 en
dc.identifier.issue 4 en
dc.identifier.startpage 614 en
dc.identifier.endpage 632 en
dc.identifier.doi 10.1364/JOSAA.10.000614
dc.neeo.contributor Sheridan|John T.|aut| en
dc.neeo.contributor Sheppard|Colin|aut| en
dc.description.othersponsorship The British Council en
dc.description.othersponsorship The Prendergast Fund en
dc.description.othersponsorship Jesus College, University of Oxford en
dc.description.admin la, pe, sp, ke, ab - kpw28/10/11 en


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