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Search Results for Collection: Physics Research Collection
Now showing items 1-5 of 5
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(SPIE, 2011-10-07)A next-generation laser-produced plasma system based on rare-earth targets generates strong resonant line emissions at 6.5–6.7nm.
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(American Institute of Physics, 2011)The collision of two laser generated plasma plumes can result, under appropriate conditions, in the formation of ‘stagnation layer’. The processes underlying this phenomenon are complex and time dependent. The majority of ...
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(Institute of Physics, 2011-09-07)Measurements of the total ion emission from a pair of colliding laser-produced aluminium plasmas were obtained with the aid of a Faraday cup detector. The energy profile width at half height of the kinetic energy distribution ...
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(American Institute of Physics, 2011-12-05)Plasmas containing gadolinium have been proposed as sources for next generation lithography at 6.x nm. To determine the optimum plasma conditions, atomic structure calculations have been performed for Gd11+ to Gd27+ ions ...
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(Society of Photo-optical Instrumentation Engineers, 2011-08-22)An engineering prototype high average power 13.5-nm source has been shipped to semiconductor facilities to permit the commencement of high volume production at a 100 W power level in 2011. In this source, UTA (unresolved ...
Now showing items 1-5 of 5