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Search Results for Collection: Physics Research Collection
Now showing items 1-4 of 4
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(SPIE, 2011-10-07)A next-generation laser-produced plasma system based on rare-earth targets generates strong resonant line emissions at 6.5–6.7nm.
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(American Institute of Physics, 2011-02-28)We have characterized the emission spectrum and temporal history of a pure potassium plasma in a capillary discharge. Strong broadband emission was observed around 40 nm due to 3s−3p, 3p−3d, and 3d−4f transitions in ions ...
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(American Institute of Physics, 2011-12-05)Plasmas containing gadolinium have been proposed as sources for next generation lithography at 6.x nm. To determine the optimum plasma conditions, atomic structure calculations have been performed for Gd11+ to Gd27+ ions ...
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(Society of Photo-optical Instrumentation Engineers, 2011-08-22)An engineering prototype high average power 13.5-nm source has been shipped to semiconductor facilities to permit the commencement of high volume production at a 100 W power level in 2011. In this source, UTA (unresolved ...
Now showing items 1-4 of 4