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(Institute of Physics, 2011-08-28)Potential extreme ultraviolet and soft x-ray radiation sources have been identified, using the flexible atomic code (FAC), as emission peaks arising from the 4d–4f and 4p–4d transitions in Pd-like to Rb-like ions of hafnium ...
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(American Physical Society, 2010)Theoretical ground-state configurations of lanthanide ions calculated with the Cowan suite of codes are presented. Theoretical 4d - 4f and 4p - 4d spectra of Pd-like to Rb-like lanthanide ions calculated using the FAC ...
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(Society of Photo-optical Instrumentation Engineers, 2011-08-22)An engineering prototype high average power 13.5-nm source has been shipped to semiconductor facilities to permit the commencement of high volume production at a 100 W power level in 2011. In this source, UTA (unresolved ...
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(American Institute of Physics, 2012)We demonstrate a table-top broadband emission water window source based on laser-produced high-Z plasmas. Resonance emission from multiply charged ions merges to produce intense unresolved transition arrays in the 2 to 4 ...
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(American Institute of Physics, 2010)Theoretical extreme ultraviolet emission spectra of gadolinium and terbium ions calculated with the Cowan suite of codes and the flexible atomic code (FAC) relativistic code are presented. 4d–4f and 4p–4d transitions give ...
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(IOP Publishing, 2004-12)Spectra from xenon ions have been recorded at the NIST EBIT and the emission into a 2% bandwidth at 13.5 nm arising from 4d_5p transitions compared with that from 4d_4f and 4p_4d transitions in Xe XI and also with that ...
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(American Institute of Physics, 2009-12-04)Many next generation lithography schemes for the semiconductor industry are based on a 13.5-nm tin plasma light source, where hundreds of thousands of 4d-4f, 4p-4d, and 4d-5p transitions from Sn5+–Sn13+ ions overlap to ...
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(Institute of Physics, 2011-08-24)We have measured extreme ultraviolet (EUV) spectra from tungsten ions around 20 nm region in plasmas produced in the Large Helical Device at the National Institute for Fusion Science. The spectra after injecting a tungsten ...
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(American Institute of Physics, 2010-09-21)Extreme ultra-violet (EUV) emission spectra from highly charged tin, xenon and tungsten ions have been measured in optically thin high-temperature plasmas produced in the Large Helical Device (LHD) at the National Institute ...
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(IOP Science, 2010-10)We have measured extreme ultraviolet (EUV) spectra from highly charged tungsten ions in low-density and high-temperature plasmas produced in the Large Helical Device at the National Institute for Fusion Science. The EUV ...