A new dynamical closed-loop method is proposed to control dielectric charging in capacitive MEMS positioners/ varactors for enhanced reliability and robustness. Instead of adjusting the magnitude of the control voltage to ...
The aim of this paper is to apply an approach that will allow us to consider different mechanical modes of a MEMS
cantilever in the form of separate mass-spring-damper equations with the appropriate form of an external ...
In this paper, we study the behaviour of a MEMS oscillator by applying methods of
nonlinear dynamics. We model the system as a kicked damped oscillator and obtain the iterative maps that describe the MEMS system. The ...
In this paper we apply methods of nonlinear
dynamics to examine the behavior of the pulsed digital oscillator for microelectromechanical systems (MEMS). We study the regions of existence of oscillations and demonstrate ...
This paper introduces a new actuation scheme for implementing Pulsed Digital Oscillators (PDOs) for electrostatic MEMS resonators. In this scheme, the capacitance of the device is biased with a voltage and it is periodically ...
In this work, we consider a system that consists of a microresonator and a ΣΔ type feedback loop control which is typically a part of inertial sensors. We describe this architecture as a dynamical system (an iterative ...
This paper extends our previous work on the
selective excitation of mechanical vibration modes in MEMS devices using Pulsed Digital Oscillators. It begins by presenting extensive simulation results using the set of iterative ...
In this paper, we study the possible output of the pulsed digital oscillator (PDO) with multiple resonant modes of the mechanical resonator in the feedback loop. PDOs are simple circuits that allow linear resonators to ...
The aim of this paper is to show that it is possible to excite selectively different mechanical resonant modes of a MEMS structure using Pulsed Digital Oscillators (PDOs). This can be done by simply changing the working ...