Browsing by Subject "Extreme ultraviolet"

Now showing items 1-2 of 2

Scaling of laser produced plasma UTA emission down to 3 nm for next generation lithography and short wavelength imaging

Li, Bowen ; Endo, Akira ; O'Gorman, Colm ; Otsuka, Takamitsu ; Cummins, T. (Thomas) ; Donnelly, Tony ; Kilbane, Deirdre ; Dunne, Padraig ; O'Sullivan, Gerry ; Jiang, Weihua ; Higashiguchi, Takeshi ; Yugami, Noboru (Society of Photo-optical Instrumentation Engineers, 2011-08-22)

An engineering prototype high average power 13.5-nm source has been shipped to semiconductor facilities to permit the commencement of high volume production at a 100 W power level in 2011. In this source, UTA (unresolved ...
Transition wavelengths and unresolved transition array statistics of ions with Z = 72 − 89

Kilbane, Deirdre (Institute of Physics, 2011-08-28)

Potential extreme ultraviolet and soft x-ray radiation sources have been identified, using the flexible atomic code (FAC), as emission peaks arising from the 4d–4f and 4p–4d transitions in Pd-like to Rb-like ions of hafnium ...

Now showing items 1-2 of 2

My Account