Plasmas containing gadolinium have been proposed as sources for next generation lithography at 6.x nm. To determine the optimum plasma conditions, atomic structure calculations have been performed for Gd11+ to Gd27+ ions ...
We have measured extreme ultraviolet (EUV) spectra from tungsten ions around 20 nm region in plasmas produced in the Large Helical Device at the National Institute for Fusion Science. The spectra after injecting a tungsten ...
Extreme ultra-violet (EUV) emission spectra from highly charged tin, xenon and tungsten ions have been measured in optically thin high-temperature plasmas produced in the Large Helical Device (LHD) at the National Institute ...
We have demonstrated rare-earth plasma extreme ultraviolet sources at 6.7 nm to investigate the spectral behavior and the conversion efficiencies to different laser wavelength and the initial target densities. The conversion ...
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