RSS
- You are here:
- Research Repository UCD
- >
- Browsing by Author
JavaScript is disabled for your browser. Some features of this site may not work without it.
Browsing by Author "Higashiguchi, Takeshi"
Now showing items 1-8 of 8
-
O'Gorman, Colm ; Otsuka, Takamitsu ; Yugami, Noboru ; Jiang, Weihua ; Endo, Akira ; Li, Bowen ; Cummins, T. (Thomas) ; Dunne, Padraig ; Sokell, Emma ; O'Sullivan, Gerry ; Higashiguchi, Takeshi (American Institute of Physics, 2012)We have demonstrated the effect of viewing angle on the extreme ultraviolet (EUV) emission spectra of gadolinium (Gd) near 6.7 nm. The spectra are shown to have a strong dependence on viewing angle when produced with a ...
-
Higashiguchi, Takeshi ; Otsuka, Takamitsu ; Yugami, Noboru ; Endo, Akira ; Li, Bowen ; Dunne, Padraig ; O'Sullivan, Gerry (American Institute of Physics, 2012)We demonstrate a table-top broadband emission water window source based on laser-produced high-Z plasmas. Resonance emission from multiply charged ions merges to produce intense unresolved transition arrays in the 2 to 4 ...
-
Li, Bowen ; Dunne, Padraig ; Higashiguchi, Takeshi ; Otsuka, Takamitsu ; Yugami, Noboru ; Jiang, Weihua ; Endo, Akira ; O’Sullivan, Gerry (American Institute of Physics, 2011-12-05)Plasmas containing gadolinium have been proposed as sources for next generation lithography at 6.x nm. To determine the optimum plasma conditions, atomic structure calculations have been performed for Gd11+ to Gd27+ ions ...
-
Cummins, T. (Thomas) ; Otsuka, Takamitsu ; Yugami, Noboru ; Jiang, Weihua ; Endo, Akira ; Li, Bowen ; O'Gorman, Colm ; Dunne, Padraig ; Sokell, Emma ; O'Sullivan, Gerry ; Higashiguchi, Takeshi (American Institute of Physics, 2012)We have demonstrated an efficient extreme ultraviolet (EUV) source at 6.7 nm by irradiating Gd targets with 0.8 and 1.06 μm laser pulses of 140 fs to 10 ns duration. Maximum conversion efficiency of 0.4% was observed within ...
-
Li, Bowen ; Endo, Akira ; O'Gorman, Colm ; Otsuka, Takamitsu ; Cummins, T. (Thomas) ; Donnelly, Tony ; Kilbane, Deirdre ; Dunne, Padraig ; O'Sullivan, Gerry ; Jiang, Weihua ; Higashiguchi, Takeshi ; Yugami, Noboru (Society of Photo-optical Instrumentation Engineers, 2011-08-22)An engineering prototype high average power 13.5-nm source has been shipped to semiconductor facilities to permit the commencement of high volume production at a 100 W power level in 2011. In this source, UTA (unresolved ...
-
Higashiguchi, Takeshi ; Otsuka, Takamitsu ; Yugami, Noboru ; Jiang, Weihua ; Endo, Akira ; Dunne, Padraig ; Li, Bowen ; O'Sullivan, Gerry (SPIE, 2011-10-07)A next-generation laser-produced plasma system based on rare-earth targets generates strong resonant line emissions at 6.5–6.7nm.
-
Higashiguchi, Takeshi ; Yamaguchi, Mami ; Otsuka, Takamitsu ; Terauchi, Hiromitsu ; Yugami, Noboru ; Yatagai, Toyohiko ; D'Arcy, Rebekah ; Dunne, Padraig ; O'Sullivan, Gerry (American Institute of Physics, 2011-02-28)We have characterized the emission spectrum and temporal history of a pure potassium plasma in a capillary discharge. Strong broadband emission was observed around 40 nm due to 3s−3p, 3p−3d, and 3d−4f transitions in ions ...
-
Otsuka, Takamitsu ; White, John ; Kilbane, Deirdre ; Higashiguchi, Takeshi ; Yugami, Noboru ; Yatagai, Toyohiko ; Jiang, Weihua ; Endo, Akira ; Dunne, Padraig ; O’Sullivan, Gerry (American Institute of Physics, 2010-12)We have demonstrated rare-earth plasma extreme ultraviolet sources at 6.7 nm to investigate the spectral behavior and the conversion efficiencies to different laser wavelength and the initial target densities. The conversion ...
Now showing items 1-8 of 8
My Account
- Submit papers via the RMS
- Administrator Login
-->(Use your UCD email address to login)
Research Repository Help
Search Research Repository
Advanced SearchBrowse
-
All of Research Repository
The Library, University College Dublin, Belfield, Dublin 4
Phone:
+353 (0)1 716 7583
Fax:
+353 (0)1 283 7667
Email:
research.repository@ucd.ie
- © 2012 University College Dublin. All Rights Reserved.
- Realization: @mire NV