Browsing by Author "Donnelly, Tony"

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Scaling of laser produced plasma UTA emission down to 3 nm for next generation lithography and short wavelength imaging

Li, Bowen ; Endo, Akira ; O'Gorman, Colm ; Otsuka, Takamitsu ; Cummins, T. (Thomas) ; Donnelly, Tony ; Kilbane, Deirdre ; Dunne, Padraig ; O'Sullivan, Gerry ; Jiang, Weihua ; Higashiguchi, Takeshi ; Yugami, Noboru (Society of Photo-optical Instrumentation Engineers, 2011-08-22)

An engineering prototype high average power 13.5-nm source has been shipped to semiconductor facilities to permit the commencement of high volume production at a 100 W power level in 2011. In this source, UTA (unresolved ...

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